Sensors on the basis of aluminum metal oxide films

Abstract

The influence water vapors and ammonia concentration in a gas atmosphere on value EMF generated by structures Al-Al2O3-SnO2 was studied. The aluminum metal-oxide surface is catalytically active and consequently adsorbed molecules dissociation takes place. Dissociation products (positive and negative charged ions and electrons) get space separation along the film thickness because the difference in their diffusion coefficients.